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Microfabrication laboratory

The MicroFabrication Laboratory is equipped with state of the art technical equipment including a direct writing lithography, spincoater, doctor blade, screen printer, plasma cleaner, thermal evaporator chamber. These instruments provide the means to fabricate flexible and streatchable electronic devices for our research. Examples are

  • Amorphous organic semiconductor thin films deposited by spincoating 
  • Organic single crystals and polycrystals grown by drop casting techniques on flexible substrates
  • Textile sensors deposited by screen printing techinques and sewing machine 
  • Electropolymerization of conducting polymer composites on functional surfaces

In our Microfabrication Laboratory we fabricate

  • Soft and stretchable materials for biotrasducers applied in in-vitro and in-vivo applications. 
  • Organic electrochemical transistor on glass, flexible substrate and on textile for biomarkers detection 
  • Organic microcystal and organic thin film transistor on flexible and transparent substrates for X-rays radiation sensors 

Direct Writing Lithography

Since October 2019 we have a direct writing lithography system in our lab. The system enables us to draw micropatterns without any physical mask, but simply with computer-controlled laser optics. Our system is a Microwriter from Durham Magneto Optics and works at a wavelength of 380 nm with 1 um resolution. We have established the basic photolithographic procedures based on positive and negative photoresisits to pattern metal-layers or other functional layers. With this high-end tool specifically fit for a R&D environment, we have complete freedom in the design of new patterns to develop new and innovative devices. In the picture you can see the system, the first fabricated device and the logo of our department writen on a glass covered by positive photoresist.

 

Contact

Maria Calienni

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