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Lab4MEMS II - Micro-Optical MEMS, micro-mirrors and pico-projectors

9 - Industry, innovation and infrastructure; Research Projects; 2014; 2015; 2016; 2017; 2018

Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems. MOEMS includes a variety of devices including optical switch, array of micro-mirrors, optical cross-connect, lasers and micro lens amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, molybdenum (Mo), silicon dioxide, silicon nitride (Si3N4), piezo coating, etc.
The trend toward miniaturization and integration of conventional optical systems will accelerate the adoption of MOEMS technology in commercialization of many industrial components which are today’s most desirable elements of optical communication, i.e. MEMS-actuated micro optical mirrors, autofocus lens or 3D laser micro-scanners.

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